Lithography
Equipment Contact Manual Training Video Quiz Minimum Number of Sessions Approx. Session Duration (Hrs)
Brewer Photoresist Spinners 1 & 2 Brianna Portillo Manual Video 1 0.5
EVG 620-mask aligner Brianna Portillo Manual Video 2 1
GCA 8500 i-line Stepper Ryan Anderson Manual Video 2 2
Heidelburg uPG101 Laser Lithography System Brianna Portillo uPG101 SOP 2 1.5
Karl Suss MA4-1 and MA4-2 Brianna Portillo Manual Video 2 1
NPGS Electron Beam Lithography Ryan Anderson 3 2
Sky 335R6 Heated-Roller Laminator Ryan Anderson 1 0.5
Etch
Equipment Contact Manual Training Video Quiz Minimum Number of Sessions Approx. Session Duration (Hrs)
IntlVac Nanoquest IBE/RIBE/CAIBE Dr. Vishal Narang Manual 3 2
Plasma Equip. Tech. Services (PETS) RIE Dr. Vishal Narang Manual Video 2 .5
PlasmaTherm Apex SLR RIE Dr. Vishal Narang Manual 1 1
PlasmaTherm Apex SLR RIE/ICP Dr. Vishal Narang Manual 1 1
PlasmaTherm Versaline Deep Silicon Etcher Dr. Vishal Narang Manual 2 1
PlasmaTherm Vision 320 RIE Dr. Vishal Narang Manual 1 1
Xactix XeF2 Etcher Dr. Vishal Narang Manual 2 .5
Yield Engineering Systems G500 O2/Ar Plasma Etcher Dr. Vishal Narang Manual 1 1
Thin Film Deposition
Equipment Contact Manual Training Video Quiz Minimum Number of Sessions Approx. Session Duration (Hrs)
CHA E-beam Evaporator Dr. Chan Ho Kim Manual Quiz 2 3.5
IntlVac Nanochrome I Ebeam/Thermal Evaporator Dr. Chan Ho Kim Manual 2 3.5
Lesker Labline Sputter System Dr. Chan Ho Kim Manual Quiz 2 3.5
Picosun R-200 Plasma Enhanced ALD Dr. Vishal Narang Manual 2 2
PlasmaTherm Versaline HDPCVD Dr. Chan Ho Kim Manual Quiz 2 2.5
PlasmaTherm Vision 310 PECVD Dr. Chan Ho Kim Manual Quiz 2 1.5
Quorum Tech Q150RES Gold/Carbon Sputter Coater Ryan Anderson Manual 1 .5
Metrology
Equipment Contact Manual Training Video Quiz Minimum Number of Sessions Approx. Session Duration (Hrs)
4 point probe Ryan Anderson Video 1 .5
Bruker Dektak XT Dr. Vishal Narang Manual Video 1 1
HP 4155A Semiconductor Parameter Analyzer and Probe Station Ryan Anderson Manual 1 1
J.A. Woollam M-2000 Ellipsometer Dr. Chan Ho Kim Manual 1 1.5
Nanometrics Nanospec Dr. Vishal Narang Manual 1 .5
Microscopy and Micro Analysis
Equipment Contact Manual Training Video Quiz Minimum Number of Sessions Approx. Session Duration (Hrs)
Carl Zeiss Axiotron Microscope Ryan Anderson Manual Video 1 .5
FEI Nova NanoSEM 430 Ryan Anderson Manual 3 1
FEI Scios Dual Beam FIB/SEM Ryan Anderson Manual 3 1.5
Nikon TMS Infrared Microscope Dr. Vishal Narang
Oxford EDS and EBSD Ryan Anderson Manual 2 2
Cleaning and Preparation
Equipment Contact Manual Training Video Quiz Minimum Number of Sessions Approx. Session Duration (Hrs)
Nitrogen Glove Box Ryan Anderson
Nova Scan Technologies UV Ozone Cleaner Ryan Anderson Manual 1 0.5
Semitool Spin Rinsers Brianna Portillo 1 .5
Ultra T SCSx124 Substrate Cleaning System Dr. Vishal Narang Manual 1 .5
Packaging
Equipment Contact Manual Training Video Quiz Minimum Number of Sessions Approx. Session Duration (Hrs)
Disco DAD 321 Dicing Saw Dr. Chan Ho Kim Manual Quiz 2 3
EVG 501 Wafer Bonder Dr. Vishal Narang Manual Video 1 1
EVG 810 Plasma Activation Dr. Vishal Narang Manual Video 1 .5
Ficontec FL-300 Optoelectronic/Flip Chip Die Bonder Manual 3 1
Nordson DAGE 4000 Bond Tester System Ryan Anderson Manual 1 .5
Tousimis AutoSamdri 815 Critical Point Dryer Ryan Anderson Manual 1 .5
West Bond 7700E Ball Bonder Ryan Anderson Manual 2 0.5
Thermal Processing
Equipment Contact Manual Training Video Quiz Minimum Number of Sessions Approx. Session Duration (Hrs)
Allwin AW610 Rapid Thermal Processor Dr. Chan Ho Kim Manual 1 1.5
Annealsys As-One RTP Dr. Chan Ho Kim Manual 1 2
Programmable Oven for Wafer Bonding Ryan Anderson Manual 1 .5

NOTE: Training Charge = (number of sessions)x(approx. session duration)x(Staff rate)