Location
1224A8
Contact
The µPG101 is a mask-less micro pattern laser writer made for direct writing applications (no photomask required!) and low volume mask making. It is designed to work with sample sizes ranging from small chips up to 150mm wafers, as well as up to 5 inch soda-lime or quartz plates for photomask making. Minimum line width is ~1um, alignment accuracy is ~200nm and maximum write area (design size) is 31 x 31 mm. 375nm and 405nm wavelength lasers are available (375nm currently installed). Maximum exposure reach area is 5”x 5.” The system can accept GDSII, DXF, BMP, or CIF file types and Layout Editor software is installed on the PC to edit GDSII files at the tool.