Photoresists and Electron Beam Lithography resists provided:
CNM2 provides the following photoresists to members by request. Contact CNM2 Admin to request the pick up of a 30ml amber bottle. Developers are available for use in the lithography areas in the cleanroom. Please note that these resists are provided only for use in CNM2.
Photoresists:
- S1813
- Futurrex NR9-1500PY
- Futurrex NR7-1500P
- Futurrex NR77-1500PY
- Futurrex NR78-8000P
- Futurrex PR1-1000A1
- Futurrex PR1-4000A1
- KL5302 Photoresist
You can find baseline recipes for most of these resists here.