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Center for Nano-MicroManufacturing
Center for Nano-MicroManufacturing
Providing researchers with micro-nanofabrication technologies, processes, and services
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UC Davis
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About Us
CNM2 Team Contact Info
Brianna Portillo
Location and Parking Information
CNM2 User Publications
Facility Tours
Cleanroom Video Tour
UC Davis Holidays
Getting Started
Internal UC Access Procedure
External Non UC Access Procedure
Facility Usage Rates Effective July 1, 2024
Microfabrication Services
Badger Lab Management Software
Safety
SDS/SOP Table
CNM2 Policies and Procedures
Chemical Directory
Request approval of non-stock chemical
Cleanroom Map
UC Davis Chemical Hygiene Plan
Equipment
Lithography
GCA 8500 i-line Stepper
EVG 620-mask aligner
Heidelburg uPG101 Laser Lithography System
Karl Suss MA4 1 & 2
Brewer Photoresist Spinners 1 & 2
NPGS Electron Beam Lithography
Sky 335R6 Heated-Roller Laminator
Etch
PlasmaTherm Apex SLR RIE/ICP
PlasmaTherm Apex SLR RIE
PlasmaTherm Versaline DSE
PlasmaTherm Vision 320 RIE
IntlVac Nanoquest IBE/RIBE/CAIBE
Xactix XeF2 Etcher
PETS RIE
Yield Engineering Systems G500 O2 Plasma Etcher
Thin Film Deposition
IntlVac Nanochrome I Ebeam/Thermal Evaporator
CHA E-beam Evaporator
Lesker Labline Sputter System
Picosun R-200 PEALD
PlasmaTherm Versaline HDPCVD
PlasmaTherm Vision 310 PECVD
Quorum Tech Gold/Carbon Sputter Coater
Metrology
J.A. Woollam M-2000 Ellipsometer
Bruker Dektak XT
Nanometrics Nanospec
4 point probe
HP 4155A and Probe Station
Microscopy and Micro Analysis
FEI Scios Dualbeam FIB/SEM
FEI Nova NanoSEM 430
Nikon TMS Infrared Microscope
Carl Zeiss Axiotron Microscope
Cleaning and Preparation
Nitrogen Glove Box
Novascan UV Ozone Cleaner
Semitool Spin Rinser
Ultra T SCSx124 Substrate Cleaning System
Packaging
EVG 501 Wafer Bonder
EVG 810 Plasma Activation
Disco DAD 321 Dicing Saw
Tousimis AutoSamdri 815 Critical Point Dryer
Nordson DAGE 4000 Bond Tester System
West Bond 7700E Wire Bonder
Thermal Processing
Allwin AW610 Rapid Thermal Processor
Annealsys As-One RTP
Programmable Oven
Training
Access to CNM2 Equipment
Equipment Basic Training
Equipment Specialized Training
General Training and Short Courses
Training Charges Explained
Process
Photoresists Provided
Photolithography and EBL Baseline Recipes
Process Monitors
Materials Provided
General Chemicals Provided
Process Notes
Contact Us
CNM2 Team Contact Info
UC Davis Holidays
AMCaT
Badger web link
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Training
General Training and Short Courses
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